PHABLE™ - MADE STANDARD PATTERNS

Eulitha’s photonic templates are made with its revolutionary PHABLE™ technology, which guarantees highest quality at an affordable price. Optimized silicon and quartz etching yields hole and pillar patterns with a slight positive slope that facilitates the imprint process. Standard templates with square and hexagonal lattices as well as linear gratings are available.

Multi-Resolution Linear Grating Combinations
Part No Pattern Period Pattern Area Max. Feature Height (Si/Quartz)
MP250L300 250nm, 275nm, 300nm 7x7mm2 square each <200nm / <100nm
MP300L600 300nm, 400nm, 500nm, 600nm 10x10mm2 square each <300nm / <150nm
MP800L1500 800nm, 1000nm, 1200nm, 1500nm 20x20mm2 square each <1000nm / <500nm
Multi-Lattice Multi-Resolution Combination Mold
Part No Pattern Period Pattern Area Max. Feature Height (Si/Quartz)
MHSL400-800 400nm - 800nm 7.5x7.5mm2 square each <400nm / <150nm

* This template contains 9 separate areas with linear, hexagonal and square arrays of different periods.

Linear patterns
Part No Pattern Period Pattern Area Max. Feature Height (Si/Quartz)
P140L_80d 140nm 80mm dia. 200nm / --
P150L_30w30 150nm 30x30mm2 75nm / --
P200L_90d 200nm 90mm dia. 200nm / --
P250L_30w30 250nm 30x30mm2 200nm / 100nm
P250L_100d 250nm 100mm dia. 200nm / 100nm
P280L_80d 280nm 80mm dia. 200nm / 100nm
P300L_30w30 300nm 30x30mm2 300nm / 100nm
P300L_100d 300nm 100mm dia. 300nm / 100nm
P400L_30w30 400nm 30x30mm2 300nm / 150nm
P400L_100d 400nm 100mm dia. 300nm / 150nm
P500L_30w30 500nm 30x30mm2 400nm / 200nm
P500L_100d 500nm 100mm dia. 400nm / 200nm
P560L_80d 560nm 80mm dia. 400nm / 200nm
P600L_100d 600nm 100mm dia. 500nm / 250nm
P800L_100d 800nm 100mm dia. 600nm / 300nm
P1000L_100d 1000nm 100mm dia. 800nm / 400nm
P1300L_75w55 1300nm 75x55mm2 1000nm / 500nm
Holes on Hexagonal Lattice
Part No Pattern Period Pattern Area Max. Feature Height (Si/Quartz)
P350h_h_100d 350nm 100mm dia. 200nm / 100nm
P450h_h_50d 450nm 50mm dia. 350nm / 150nm
P520h_h_20w20 520nm 20x20mm2 450nm / 200nm
P600h_h_46w46 600nm 46x46mm2 450nm / 200nm
P600h_h_100d 600nm 100mm dia. 450nm / 200nm
P750h_h_51w51 750nm 51x51mm2 450nm / 200nm
P780h_h_20w20 780nm 20x20mm2 450nm / 200nm
P780h_h_50d 780nm 50mm dia. 450nm / 200nm
P1000h_h_20w20 1000nm 20x20mm2 600nm / 300nm
P1000h_h_51w51 1000nm 51x51mm2 600nm / 300nm
P1500h_h_20w20 1500nm 20x20mm2 600nm / 300nm
P1500h_h_51w51 1500nm 51x51mm2 600nm / 300nm
P1700h_h_100 1700mm 100mm dia. 600nm / 300nm
P2000h_h_100d 2000mm 100mm dia. 800nm / 400nm
P3000h_h_100d 3000nm 100mm dia. 1000nm / 400nm
P3500h_h_100d 3500nm 100mm dia. 1200nm / 500nm
Holes on Square Lattice
Part No Pattern Period Pattern Area Max. Feature Height (Si/Quartz)
P350s_h_20w20 350nm 20x20mm2 300nm / 150nm
P350s_h_100d 350nm 100mm dia. 300nm / 150nm
Pillars on Hexagonal Lattice
Part No Pattern Period Pattern Area Max. Feature Height (Si/Quartz)
P450h_p_50d 450nm 50mm dia. 350nm / 150nm
P600h_p_46w46 600nm 46x46mm2 450nm / 200nm
P600h_p_100d 600nm 100mm dia. 450nm / 200nm
P750h_p_51w51 750nm 51x51mm2 450nm / 200nm
P780h_p_20w20 780nm 20x20mm2 450nm / 200nm
P780h_p_50d 780nm 50mm dia. 450nm / 200nm
P1000h_p_20w20 1000nm 20x20mm2 600nm / 300nm
P1000h_p_51w51 1000nm 51x51mm2 600nm / 300nm
P1500h_p_20w20 1500nm 20x20mm2 600nm / 300nm
P1500h_p_51w51 1500nm 51x51mm2 600nm / 300nm
p1700h_p_100d 1700nm 100mm dia. 700nm / 300nm
p2000h_p_100d 2000nm 100mm dia. 800nm / 400nm
P3000h_p_100d 3000nm 100mm dia. 1000nm / 400nm
P3500h_p_100d 3500nm 100mm dia. 1200nm / 500nm
Pillars on Square Lattice
Part No Pattern Period Pattern Area Max. Feature Height (Si/Quartz)
P140s_p_80d 140nm 80mm dia. 75nm / ---
P150s_p_30w30 150nm 30x30mm2 75nm / ---
P200s_p_90d 200nm 90mm dia. 200nm / ---
P250s_p_30w30 250nm 30x30mm2 200nm / 100nm
P250s_p_100d 250nm 100mm dia. 200nm / 100nm
P280s_p_80d 280nm 80mm dia. 200nm / 100nm
P300s_p_30w30 300nm 30x30mm2 200nm / 100nm
P300s_p_100d 300nm 100mm dia. 200nm / 100nm
P400s_p_30w30 400nm 30x30mm2 200nm / 100nm
P400s_p_100d 400nm 100mm dia. 200nm / 100nm
P500s_p_30w30 500nm 30x30mm2 400nm / 200nm
P500s_p_100d 500nm 100mm dia. 400nm / 150nm
P560s_p_80d 560nm 80mm dia. 400nm / 150nm
P600s_p_100d 600nm 100mm dia. 500nm / 250nm
P800s_p_100d 800nm 100mm dia. 500nm / 300nm
  • Photonic templates are provided on 4” Silicon or Fused Silica substrates as standard
  • Dicing to smaller substrate size or other substrate sizes are available upon request
  • Feature (hole or pillar) diameter is about half of the pattern pitch
  • Please inquire, if other duty-cycles, e.g. small pillars or holes are required.
  • Templates are manufactured upon order according to the feature height requested by the customer
  • Inquire for different feature heights that exceed the maximum indicated in the product tables
  • In most cases these standard patterns can be produced on customer’s own wafers, e.g. as photoresist patterns on GaN or sapphire wafers.
  • Anti-adhesion coating as well as dicing is available as an option on all NIL stamps
  • Nickel molds can be done from Si molds as a copy
  • Injection moulding mould inserts can be done using a nickel mold and a special fabrication process

Applications

  • LED Light extraction layers
  • Templates for crystal growth
  • Nanoimprint process development
  • Sensor arrays
  • Nanoparticle production

Featured

High resolution linear grating - 140nm period

Further examples

Silicon template Hexagonal array - 600nm pitch done by Phable
Hexagonal array - 600nm pitch
Nanoimprint template
MHSL400-800: Multi-Lattice, Multi-Resolution template including hexagonal, square arrays and linear gratings
Array of square holes - 1000nm period
Phable made template nano imprint - Hexagonal array - 600nm pitch
Hexagonal hole array - 600nm pitch
Hexagonal hole array - 600nm pitch
Hexagonal hole array - 600nm pitch
Phable made nano imprint templates - Hexagonal array pillars - 600nm pitch
Hexagonal pillar array - 600nm pitch
Phable made template nao imprint - Hexagonal pillar array - 600nm pitch - 1µm height
Hexagonal pillar array - 600nm pitch - 1µm height
Phable template nano structures - Square pillar array - 300nm pitch
Square pillar array - 300nm pitch
Phable template nano structures - Hexagonal pillar lattice array - 3000nm pitch on 4inch available
Hexagonal pillar array - 3000nm pitch
Silicon template with nano structures done by Phable - Hexagonal hole array on 4" wafer - 600nm pitch
Hexagonal hole array on 4" wafer - 600nm pitch