NANO & MICRO V-GROOVES BY ANISOTROPIC ETCHING OF SILICON

Anisotropic wet-etching of Si is a well-known micro- or nano-fabrication technique for obtaining smooth and precise geometrical shapes in the material. The process, however, requires considerable know-how which often discourages researchers from taking advantage of this unique possibility. Eulitha has combined its experience in the fabrication of periodic patterns with its wet etching expertise to offer standard and customized solutions. You can select either a standard item from the following list or contact us with your requirements for a custom-made solution.

Linear Pattern
Part No Pattern Period Pattern Area Feature Height
P1300L_v_25w25       1300nm       25x25mm2       800nm
Anisotropically etched v-grooves in Si
SEM image of a 1.3um period v-groove pattern in silicon
Anisotropically etched v-grooves in Si
Cross-section image of a 10um period v-groove pattern in silicon