PHABLE™ - MADE STANDARD PATTERNS

Eulitha’s photonic templates are made with its revolutionary PHABLE™ technology, which guarantees highest quality at an affordable price. Optimized silicon and quartz etching yields hole and pillar patterns with a slight positive slope that facilitates the imprint process. Standard templates with square and hexagonal lattices as well as linear gratings are available.

Multi-Resolution Linear Grating Combinations
Part No Pattern Period Pattern AreaMax. Feature Height (Si/Quartz)
MP250L300250nm, 275nm, 300nm7x7mm2 square each<200nm / <100nm
MP300L600300nm, 400nm, 500nm, 600nm10x10mm2 square each<300nm / <150nm
MP800L1500800nm, 1000nm, 1200nm, 1500nm20x20mm2 square each<1000nm / <500nm
MP500L2050500nm, 550nm,..., 2000nm, 2050nm12x12mm2 square each<600nm / <300nm
Multi-Lattice Multi-Resolution Combination Mold
Part No Pattern Period Pattern AreaMax. Feature Height (Si/Quartz)
MHSL400-800400nm - 800nm7.5x7.5mm2 square each<400nm / <150nm

* This template contains 9 separate areas with linear, hexagonal and square arrays of different periods.

Linear patterns
Part No Pattern Period Pattern AreaMax. Feature Height (Si/Quartz)
P125L_80d125nm80mm dia.100nm / --
P140L_80d140nm80mm dia.100nm / --
P150L_30w30150nm30x30mm2 75nm / --
P150L_90d 150nm90mm dia. 75nm / --
P200L_90d 200nm90mm dia.200nm / --
P250L_30w30 250nm 30x30mm2200nm / 100nm
P250L_100d 250nm 100mm dia.200nm / 100nm
P280L_80d 280nm 80mm dia.200nm / 100nm
P300L_30w30 300nm30x30mm2300nm / 100nm
P300L_100d 300nm100mm dia.300nm / 100nm
P400L_30w30 400nm30x30mm2300nm / 150nm
P400L_100d400nm100mm dia.300nm / 150nm
P500L_30w30 500nm30x30mm2400nm / 200nm
P500L_100d 500nm100mm dia.400nm / 200nm
P560L_80d 560nm80mm dia.400nm / 200nm
P600L_100d600nm100mm dia.500nm / 250nm
P800L_100d800nm100mm dia.600nm / 300nm
P1000L_100d1000nm100mm dia.800nm / 400nm
P1300L_75w551300nm75x55mm21000nm / 500nm
Holes on Hexagonal Lattice
Part No Pattern Period Pattern AreaMax. Feature Height (Si/Quartz)
P350h_h_100d350nm100mm dia.200nm / 100nm
P450h_h_50d450nm50mm dia.350nm / 150nm
P520h_h_20w20520nm20x20mm2450nm / 200nm
P600h_h_46w46600nm46x46mm2450nm / 200nm
P600h_h_100d600nm100mm dia.450nm / 200nm
P750h_h_51w51750nm51x51mm2450nm / 200nm
P780h_h_20w20780nm20x20mm2450nm / 200nm
P780h_h_50d780nm50mm dia.450nm / 200nm
P1000h_h_20w201000nm20x20mm2600nm / 300nm
P1000h_h_51w511000nm51x51mm2600nm / 300nm
P1000h_h_100d1000nm100mm dia.600nm / 300nm
P1500h_h_20w201500nm20x20mm2600nm / 300nm
P1500h_h_51w511500nm51x51mm2600nm / 300nm
P1700h_h_1001700mm100mm dia.600nm / 300nm
P2000h_h_100d2000mm100mm dia.800nm / 400nm
P3000h_h_100d3000nm100mm dia.1000nm / 400nm
P3500h_h_100d3500nm100mm dia.1200nm / 500nm
P5200h_h_100d5200nm100mm dia.1200nm / 500nm
Holes on Square Lattice
Part No Pattern Period Pattern AreaMax. Feature Height (Si/Quartz)
P350s_h_20w20350nm20x20mm2300nm / 150nm
P350s_h_100d350nm100mm dia.300nm / 150nm
Pillars on Hexagonal Lattice
Part No Pattern Period Pattern AreaMax. Feature Height (Si/Quartz)
P600h_p_46w46600nm46x46mm2450nm / 200nm
P600h_p_100d600nm100mm dia.450nm / 200nm
P750h_p_51w51750nm51x51mm2450nm / 200nm
P780h_p_20w20780nm20x20mm2450nm / 200nm
P780h_p_50d780nm50mm dia.450nm / 200nm
P1000h_p_20w201000nm20x20mm2600nm / 300nm
P1000h_p_51w511000nm51x51mm2600nm / 300nm
P1000h_p_100d1000nm100mm dia.600nm / 300nm
P1500h_p_20w201500nm20x20mm2600nm / 300nm
P1500h_p_51w511500nm51x51mm2600nm / 300nm
P1700h_p_100d1700nm100mm dia.800nm / 400nm
P2000h_p_100d2000nm100mm dia.800nm / 400nm
P3000h_p_100d3000nm100mm dia.1000nm / 400nm
P3500h_p_100d3500nm100mm dia.1200nm / 500nm
P5200h_p_100d5200nm100mm dia.1200nm / 500nm
Pillars on Square Lattice
Part No Pattern Period Pattern AreaMax. Feature Height (Si/Quartz)
P140s_p_80d140nm80mm dia.75nm / ---
P150s_p_30w30150nm30x30mm275nm / ---
P200s_p_90d200nm90mm dia.200nm / ---
P250s_p_30w30250nm30x30mm2200nm / 100nm
P250s_p_100d250nm100mm dia.200nm / 100nm
P280s_p_80d280nm80mm dia.200nm / 100nm
P300s_p_30w30300nm30x30mm2200nm / 100nm
P300s_p_100d300nm100mm dia.200nm / 100nm
P400s_p_30w30400nm30x30mm2200nm / 100nm
P400s_p_100d400nm100mm dia.200nm / 100nm
P500s_p_30w30500nm30x30mm2400nm / 200nm
P500s_p_100d500nm100mm dia.400nm / 150nm
P560s_p_80d560nm80mm dia.400nm / 150nm
P600s_p_100d600nm100mm dia.500nm / 250nm
P800s_p_100d800nm100mm dia.500nm / 300nm

  • Photonic templates are provided on 4” Silicon or Fused Silica substrates as standard
  • Dicing to smaller substrate size or other substrate sizes are available upon request
  • Feature (hole or pillar) diameter is about half of the pattern pitch
  • Please inquire, if other duty-cycles, e.g. small pillars or holes are required.

  • Templates are manufactured upon order according to the feature height requested by the customer
  • Inquire for different feature heights that exceed the maximum indicated in the product tables
  • In most cases these standard patterns can be produced on customer’s own wafers, e.g. as photoresist patterns on GaN or sapphire wafers.

  • Anti-adhesion coating as well as dicing is available as an option on all NIL stamps

  • Nickel molds can be done from Si molds as a copy

  • Injection moulding mould inserts can be done using a nickel mold and a special fabrication process

Applications

  • LED Light extraction layers
  • Templates for crystal growth
  • Nanoimprint process development
  • Sensor arrays
  • Nanoparticle production

Featured

High resolution linear grating - 140nm period

Further Examples

32 different period linear gratings
MP500L2050 - 32 different period linear gratings on 100mm wafer
Silicon template Hexagonal array - 600nm pitch done by Phable
Hexagonal array - 600nm pitch
Nanoimprint template
MHSL400-800: Multi-Lattice, Multi-Resolution template including hexagonal, square arrays and linear gratings
Array of square holes - 1000nm period
Phable made template nano imprint - Hexagonal array - 600nm pitch
Hexagonal hole array - 600nm pitch
Hexagonal hole array - 600nm pitch
Hexagonal hole array - 600nm pitch
Phable made nano imprint templates - Hexagonal array pillars - 600nm pitch
Hexagonal pillar array - 600nm pitch
Phable made template nao imprint - Hexagonal pillar array - 600nm pitch - 1µm height
Hexagonal pillar array - 600nm pitch - 1µm height
Phable template nano structures - Square pillar array - 300nm pitch
Square pillar array - 300nm pitch
Phable template nano structures - Hexagonal pillar lattice array - 3000nm pitch on 4inch available
Hexagonal pillar array - 3000nm pitch
Silicon template with nano structures done by Phable - Hexagonal hole array on 4" wafer - 600nm pitch
Hexagonal hole array on 4" wafer - 600nm pitch