Anisotropic wet-etching of Si is a well-known micro- or nano-fabrication technique for obtaining smooth and precise geometrical shapes in the material. The process, however, requires considerable know-how which often discourages researchers from taking advantage of this unique possibility. Eulitha has combined its experience in the fabrication of periodic patterns with its wet etching expertise to offer standard and customized solutions. You can select either a standard item from the following list or contact us with your requirements for a custom-made solution.
Part No | Pattern Period | Pattern Area | Feature Height |
---|---|---|---|
P1300L_v_25w25 | 1300nm | 25x25mm2 | 800nm |