600nm period hexagonal hole array

PHABLE is a unique photolithography technology developed by Eulitha for producing large area periodic patterns.

Eulitha uses the latest e-beam technology to offer custom patterning services and standard patterns, such as nanoimprint templates.

Eulitha offers transmission gratings made on thin silicon nitride membranes for EUV lithography and spectrometry.

Eulitha's nano-lithography technologies are used in both research and production, for example for production of patterned sapphire substrates used in LED fabrication.